A filter is built into the flow path of the single chamber! You can use it with confidence, especially with high-purity gases.
The "S-TORRV50/50SH series" is a pressure regulator developed based on the TORR regulator, which has gained immense trust in semiconductor process gas lines, specifically for ultra-high purity gases. For corrosive gases, we offer the "SH series," which uses a highly corrosion-resistant Ni-Cr-Mo alloy for the main metal parts in contact with the gas. We conduct a complete inspection, including He leak tests, on all units before shipment. This model is widely used in low-pressure piping and outlet panels that require higher flow rates than the "STV30," as well as in liquefied gas cylinder cabinets. 【Features】 ■ Medium flow model for low pressure on the primary side ■ Eliminates threaded structures in gas contact parts and comes standard with electropolishing ■ Achieves very high moisture replacement characteristics and particle reduction ■ The connection between the main body and fittings is welded, and the external seal of the diaphragm section employs a metal seal structure ■ High external sealing capability allows for safe use, especially with high-purity gases *For more details, please refer to the PDF document or feel free to contact us.
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【Other Features】 - Built-in filter in the primary chamber flow path to reduce internal leakage. - Developed based on the TORR regulator, which has gained immense trust in semiconductor process gas lines. - Comprehensive shipping inspections, including He leak tests, conducted on all units. - Widely usable for low-pressure piping that requires higher flow rates than the "STV30" model, as well as for outlet panels and liquefied gas cylinder cabinets. - The "SH series" is available, using a highly corrosion-resistant Ni-Cr-Mo alloy for the main gas contact metal parts. *For more details, please refer to the PDF materials or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Nissansan TANAKA Co., Ltd. aims to provide total solutions for cutting, welding, and gas control by offering products and services that satisfy customers, centered around original technology. Leveraging years of experience and unique technology, we strive to develop and expand our lineup of various products, including laser cutting machines, plasma cutting machines, gas cutting machines, and more, contributing to the industry by turning yesterday's dreams into today's reality.