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  6. High Purity Gas Pressure Regulator "TORR-150 Series"

High Purity Gas Pressure Regulator "TORR-150 Series"

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last updated:Aug 05, 2025

日酸TANAKA 産業機器事業部
日酸TANAKA 産業機器事業部
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Medium flow model for low pressure on the primary side! Assembly is carried out in a clean room with a class 1000 level of 0.3μm for all units!

The "TORR-150 series" is a high-purity gas pressure regulator with a gas-contact metal surface roughness of Ra 0.25 μm, and it is also capable of producing electropolished specifications. The TORR series is known as the "standard for semiconductor gas pressure regulators" due to its long-standing track record and high reliability. All units undergo a complete shipping inspection, including a He leak test. It can be used for applications such as primary pressure reduction of liquefied gases and regulators for piping that requires high flow rates, as a large flow model for low primary pressure. 【Features】 ■ Medium flow model for low primary pressure ■ Assembly is conducted in a clean room with a class 1000 standard at 0.3 μm ■ Complete shipping inspection, including He leak tests, is performed on all units ■ Electropolished specifications can also be produced (gas-contact metal surface roughness Ra 0.25 μm) *For more details, please refer to the PDF document or feel free to contact us.

    PressurePressure Control
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High Purity Gas Pressure Regulator "TORR-150 Series"

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  • Related Link - http://nissantanaka.com/product/semiconductor/hand…
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【Performance】 ■ Maximum operating pressure on the inlet side: 2.0MPa ■ Maximum operating pressure on the outlet side: 0.6MPa ■ Maximum flow rate: 2,400L/min (nor) (P1=1.5MPa, P2=0.6MPa, N2 GAS) ■ Operating temperature: -5 to 40℃ ■ Weight: 3.7kg ■ Inlet and outlet port diameter: 1/2" ■ External leakage rate: 1.3×10^-8Pa·m3/sec or less *For more details, please refer to the PDF document or feel free to contact us.

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【Usage】 ■ As a high-flow model for primary low-pressure applications, used for primary pressure reduction of liquefied gases or regulators used in piping that requires flow. * For more details, please refer to the PDF materials or feel free to contact us.

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High Purity Gas Pressure Regulator "TORR-150 Series"

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日酸TANAKA

日酸TANAKA 産業機器事業部

Industrial Machinery

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Nissansan TANAKA Co., Ltd. aims to provide total solutions for cutting, welding, and gas control by offering products and services that satisfy customers, centered around original technology. Leveraging years of experience and unique technology, we strive to develop and expand our lineup of various products, including laser cutting machines, plasma cutting machines, gas cutting machines, and more, contributing to the industry by turning yesterday's dreams into today's reality.

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