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  6. High Purity Gas Pressure Regulator "TORR-800 Series"

High Purity Gas Pressure Regulator "TORR-800 Series"

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last updated:Aug 05, 2025

日酸TANAKA 産業機器事業部
日酸TANAKA 産業機器事業部
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The epitome of pressure regulators for semiconductor gases! A helium leak test is conducted on all units during the shipping inspection!

The "TORR-800 Series" is one of the largest pressure regulators in the TORR series. You can choose between the "TORR-800G Series," which features a pressure adjustment handle that operates with the same feel as a standard pressure regulator, and the "TORR-800M Series," which is a pilot-operated model capable of supplying a larger flow rate. Additionally, there is the "TORR-800F Series," which can supply an even larger flow rate than the "TORR-800M Series." Please contact us if you require a higher flow rate. 【Features】 ■ High flow rate model for low pressure on the primary side ■ Assembly is conducted in a clean room with a class 1000 standard for all units ■ Comprehensive shipping inspections, including He leak tests, are performed on all units ■ One of the largest sizes in the TORR series *For more details, please refer to the PDF document or feel free to contact us.

    PressurePressure Control
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High Purity Gas Pressure Regulator "TORR-800 Series"

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  • Related Link - http://nissantanaka.com/product/semiconductor/hand…
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【Performance】 ■ Maximum operating pressure on the inlet side: 1.0MPa ■ Maximum operating pressure on the outlet side: 0.6MPa ■ Maximum flow rate ・800G: 280m3/h (nor) (P1=0.7MPa, P2=0.6MPa, N2 GAS) ・800M: 500m3/h (nor) (P1=0.9MPa, P2=0.6MPa, N2 GAS) ■ Operating temperature: -5 to 40℃ ■ Weight: 32kg (800G series) / 38kg (800M series) ■ External leak rate: 1.3×10^-4Pa·m3/sec or less *For more details, please refer to the PDF document or feel free to contact us.

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High Purity Gas Pressure Regulator "TORR-800 Series"

High Purity Gas Pressure Regulator "TORR-800 Series"

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日酸TANAKA

日酸TANAKA 産業機器事業部

Industrial Machinery

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Nissansan TANAKA Co., Ltd. aims to provide total solutions for cutting, welding, and gas control by offering products and services that satisfy customers, centered around original technology. Leveraging years of experience and unique technology, we strive to develop and expand our lineup of various products, including laser cutting machines, plasma cutting machines, gas cutting machines, and more, contributing to the industry by turning yesterday's dreams into today's reality.

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