Tantalum carbide coating technology that reduces backside particles in high-temperature wafer processes for SiC semiconductors and nitride semiconductor manufacturing, while protecting graphite.
"Tantalum carbide coating" has corrosion resistance against ammonia, hydrogen, hydrochloric acid, and molten metals at ultra-high temperatures. By coating graphite components, it helps reduce particle generation and extend lifespan. We also offer other coatings such as pyrolytic boron nitride (PBN) coating and pyrolytic graphite (PG) coating. 【Features】 ■ High dimensional accuracy due to uniform coating ■ Excellent coverage that can accommodate complex shapes ■ Conductivity ■ Superior wear resistance *For more details, please refer to the catalog. Feel free to contact us with any inquiries.
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Momentive Technologies Japan Co., Ltd. develops, manufactures, and sells high thermal conductivity heat sinks, heaters/electrostatic chucks, ceramic products, and corrosion/heat-resistant coatings. We also handle a wide range of quartz and silicone products. Please feel free to contact us when you need assistance.