Coating that protects graphite in high-temperature corrosive atmospheres. Effective for MOCVD of SiC and GaN.
This is a product coated with PBN (pyrolytic boron nitride), PG (pyrolytic graphite), TaC (tantalum carbide), and other materials on graphite components. It can accommodate various products and shapes such as wafer trays, heaters, gears, tubes, and crucibles. 【Features】 1) Protects graphite in corrosive atmospheres at high temperatures, such as NH3 and H2. 2) Available in both electrically insulating and conductive coatings. 3) Protects components for high-temperature MOCVD applications. 4) Has excellent coating properties. *For more details, please refer to the catalog or feel free to contact us.
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Momentive Technologies Japan Co., Ltd. develops, manufactures, and sells high thermal conductivity heat sinks, heaters/electrostatic chucks, ceramic products, and corrosion/heat-resistant coatings. We also handle a wide range of quartz and silicone products. Please feel free to contact us when you need assistance.