Ideal for contamination removal, marking, repair, and probing on wafers.
The AxisPro is a micromanipulator system designed to make the traditionally labor-intensive and skill-requiring tasks of analytical sample preparation easy and accessible for anyone. By using AxisPro, the burden on operators is reduced, and accurate sampling becomes possible, dramatically improving the standardization, accuracy, and reproducibility of work. It enables the handling of micro-objects in various situations, regardless of whether they are organic or inorganic. *For more details, please contact us via the link below.*
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basic information
【Application Examples】 ■ Removal of microscopic contamination on wafers ■ Repair of fine wiring patterns (connection/excision) ■ Pickup of microscopic foreign substances mixed in LCD/OEL ■ Removal and collection of foreign substances adhered to build-up substrate terminals ■ Removal and collection of contamination on image sensors ■ Sampling for analysis of contamination on photomasks and gratings ■ Pinpoint marking for SEM analysis (e.g., on wafers) ■ FIB processing area marking for internal defect analysis of glass ■ Scribing for substrate cleaving ■ Remote fine work in non-atmospheric exposure environments ■ Grasping control of fine wiring (in conjunction with spot welding)
Price information
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Price range
P6
Applications/Examples of results
Examples of Applications in Microanalysis Sample Preparation ■ Contamination analysis using microscopic IR (isolation, collection, concentration, surface preparation, smoothing) ■ Depth direction analysis from the surface (cutting of embedded foreign substances, degradation measurement, single-layer analysis of multilayer structures) ■ General analysis involving microcrystals (XRD analysis, high-temperature high-pressure phase behavior analysis, protein crystal analysis) ■ Thermal decomposition GC/MS; direct sample introduction MS (DEP method) ■ FIB lift-out (pickup and transfer after cutting out) ■ Pinpoint marking (resin, metal, glass, crystals, etc.)
Line up（2）
| Model number | overview |
|---|---|
| APFC-302 | Axis Pro FC Standard Set |
| APSS-304 | Axis Pro SS Electric Full Set |
Company information
Micro Support is a manufacturer of sampling systems for analytical pre-processing based on microscopes. We provide hardware and software that can be freely operated with a manipulator while observing microscopic foreign substances that are not visible to the naked eye through a microscope. We are also focusing on the development of new products that apply precision positioning technology.
