The stroke width is 5mm! A sample holder with a backlash-free stopper is included.
The "Vacuum Chuck Holder" is a sample holder that allows for automatic precision grinding up to a set amount of grinding. The grinding amount can be set with a precision of ±3μm or less (with a minimum reading of 1μm dial gauge included), and the stroke width is 5mm. It is suitable for sample preparation for transmission electron microscopy and for thinning of compound semiconductors such as Si wafers and InP. 【Features】 ■ Ideal for sample preparation for transmission electron microscopy ■ Capable of automatic precision grinding up to the set amount ■ Grinding amount can be set with a precision of ±3μm or less ■ Comes with a zero-backlash stopper ■ Stroke width is 5mm *For more details, please refer to the PDF document or feel free to contact us.
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【Lineup】 ■PJ-2 (Suction surface size Φ2in.) ■PJ-3 (Suction surface size Φ3in.) ■PJ-4 (Suction surface size Φ4in.) 【Sample Size】 Samples can be adhered to wafer-shaped objects or glass discs for suction. 【Examples of Materials with Processing Experience】 ■Semiconductor materials (Silicon, Germanium, Silicon Carbide, Strontium Silicate, Gallium Arsenide, Indium Gallium Arsenide, Indium Phosphide, Indium Gallium Zinc Oxide, Gallium Nitride, Gallium Oxide, Cadmium Telluride, etc.) ■Optical materials (Quartz glass, Sapphire, Fluorite lenses, Spinel, Phosphate glass, Lithium borate, Acrylic resin, CLBO, YiG, GGG, etc.) ■Ceramic materials (Alumina, Zirconia, Silicon Nitride, Ferrite, etc.) ■Metal materials (Steel materials, Stainless steel, Copper, Gold, Silver, Platinum, Aluminum, Titanium, Molybdenum, etc.) *For more details, please refer to the PDF document or feel free to contact us.
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【Purpose】 ■ Precision polishing of 2-inch to 4-inch wafers and wafer chips ■ Polishing of wafer chips with multilayer structures for backside SIMS data preparation (□5mm to □10mm) down to a remaining thickness of 1μm to 2μm *For more details, please refer to the PDF document or feel free to contact us.
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Company information
Our company has been manufacturing polishing equipment, cutting machines, and scribers suitable for precision machining using the technical know-how we have cultivated over many years. We have a significant track record, particularly in cutting-edge technology fields such as semiconductors, ceramics, and optical communications. In addition to standard specification equipment, we also accept the design and manufacture of custom specifications tailored to our customers' needs. To meet the increasing demands for precision in machining and the diversifying needs, we will continue to advance with innovative ideas and technology.