[Labor Accident Case] Poisoning during maintenance work on semiconductor manufacturing equipment.
Introducing a case of poisoning that occurred during maintenance work on semiconductor manufacturing equipment.
After a meeting regarding the baking and oxidation work conducted by the semiconductor manufacturer for maintenance, harmful substances remaining in the semiconductor manufacturing equipment were detected using a detection tube. During this process, harmful substances leaked, and an individual passing by the equipment was affected. The affected person, after resting for about an hour in the office due to feeling unwell, received a consultation from the manufacturer's industrial physician. Following the industrial physician's instructions, they went to a university hospital for further examination, where they were diagnosed with acute drug poisoning and required a four-day hospitalization. 【Suggestion】 ■ It is recommended to use gas monitors to check environmental concentrations before work, confirm leakage during work, and verify restoration to original conditions after work. *For more details, please refer to the PDF document or feel free to contact us.
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【Case Summary】 ■Location of Occurrence - During maintenance work on semiconductor manufacturing equipment ■Countermeasures - Ensure that harmful substances can be detected without opening the equipment door - Consider automating the detection system so that harmful substances can be detected without opening the door *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Riken Keiki Co., Ltd. was established as one of the companies in the "Riken Foundation" group and has since focused on the scientific and technological advancements of the Riken Institute. As a specialized manufacturer of industrial gas detection and alarm equipment, we have worked to ensure industrial disaster prevention safety by preventing explosions caused by flammable gases and monitoring harmful gases in the workplace. Moving forward, we aim for zero loss of precious human lives and valuable assets, further strengthening our technological development capabilities. We will supply high-quality industrial gas detection and alarm equipment, as well as various excellent gas sensors, to countries around the world, contributing to the assurance of industrial disaster prevention safety.