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  6. Active Magnetic Field Canceller "AMC-331"

Active Magnetic Field Canceller "AMC-331"

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last updated:Mar 11, 2026

特許機器
特許機器
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Introduction of a high-performance active magnetic field canceller created by the micro-vibration measurement technology of patented equipment.

The "AMC-331" is a high-performance active magnetic field canceller that protects electron beam application devices from magnetic field fluctuations. By controlling the disturbance magnetic field detected by magnetic field sensors using a combination of a controller and Helmholtz coils, it suppresses the effects of disturbance magnetic fields. It helps improve the images of electron microscopes and enhances the processing accuracy of electron beam processing devices. 【Features】 ■ Excellent attenuation performance of up to 40-60 dB ■ Achieves about 1/10 the cost compared to magnetic field measures using shielding ■ Simply fix the coils around the device ■ Design coils according to the target device ■ Control multiple disturbance magnetic fields precisely based on frequency analysis *For more details, please refer to the PDF document or feel free to contact us.

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2022-01-27_13h20_43.png

Active Magnetic Field Canceller "AMC-331"

2022-01-27_13h20_43.png
2022-01-27_13h20_43.png
  • Related Link - https://www.tokkyokiki.co.jp/product-nanotechnolog…

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basic information

【Other Features】 ■ Control Method: Quasi-DC + AC Representative Value Control + Independent Feedback Control for Each Axis ■ Control Range: ±15μT (Certification Available) ■ Control Frequency: Quasi-DC to 1kHz ■ Damping Rate: 40 to 60dB *For more details, please refer to the PDF document or feel free to contact us.

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【Applications】 ■Scanning Electron Microscope (SEM) ■Transmission Electron Microscope (TEM) ■Focused Ion Beam (FIB) ■Length Measurement SEM (CD-SEM) ■Electron Beam Lithography (EBL) ■Mass Spectrometer (MS) *For more details, please refer to the PDF document or feel free to contact us.

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Active Magnetic Field Canceller "AMC-331"

Active Magnetic Field Canceller "AMC-331"

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特許機器

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By controlling vibrations, we can create a comfortable, precise, and safe environment. Our patented equipment is a pioneering company that solves vibration problems. We provide vibration control products tailored to various solutions and applications, ranging from seismic isolation and damping products to micro-vibration control in the nanotechnology industry, as well as environmental measurement, structural analysis, and response prediction (including seismic isolation and resistance products, vibration isolation devices, damping devices, and vibration reduction devices).

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