Air Pressure Active Micro-Vibration Control System "α Series"

Possible from 3 points to multi-point support! Micro-vibration control technology tailored to the specifications and requirements of the equipment.

The "α Series" is a pneumatic active micro-vibration control system that brings together the essence of micro-vibration control technology. As semiconductors and liquid crystals become increasingly miniaturized, there is a transition towards higher precision and speed to improve production efficiency, where technology that can quickly eliminate large direct disturbances is required. This product meets the demands of such a market, offering excellent vibration isolation performance, control performance, and recovery performance. 【Features】 ■ Excellent vibration isolation characteristics ■ Fast settling time and accurate position control ■ High durability *For more details, please refer to the PDF materials or feel free to contact us.

Vibration Monitoring