It is possible to easily prevent the backflow of oil vapor! It efficiently adsorbs oil molecules.
The "Foreline Trap" efficiently adsorbs oil molecules using a molecular sieve installed in the gas pathway. Furthermore, by cooling the molecular sieve with liquid nitrogen, it effectively adsorbs not only oil molecules but also water vapor (in the case of the Foreline Trap S). Additionally, since it has a built-in heater, the adsorption capacity of the molecular sieve can be easily regenerated by baking the molecular sieve before use. 【Features】 ■ Easily prevents backflow of oil ■ Efficiently adsorbs oil molecules using the molecular sieve installed in the gas pathway ■ The adsorption capacity of the molecular sieve can be easily regenerated by baking it before use *For more details, please refer to the PDF document or feel free to contact us.
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【Lineup】 ■Foreline Trap 2F ■Foreline Trap S *For more details, please refer to the PDF document or feel free to contact us.
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【Purpose】 ■Prevention of oil vapor backflow from oil rotary vacuum pumps *For more details, please refer to the PDF document or feel free to contact us.
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Canon Anelva has been honing its skills in the ultra-high vacuum field, which requires advanced technological capabilities, since its establishment in 1967 as a developer and manufacturer of vacuum thin film formation equipment and vacuum components. As a company expanding its business globally, we aim to contribute to the development of international society under the corporate philosophy of "coexistence" advocated by the Canon Group. Moving forward, we will continue to strive to create high value-added products based on solid technological capabilities and play a role in the advancement of electronics.