Using a bellows for the shaft seal! There is no worry about atmospheric contamination during gas introduction.
The "951-7179 Inlet Valve" is a product designed to introduce specific gases into vacuum systems. The shaft seal is made of austenitic stainless steel bellows, and the vacuum seal uses fluororubber (Viton). It is suitable as a gas introduction valve for high vacuum and ultra-high vacuum devices. It can also be used in ultra-high vacuum areas down to approximately 10^-7 Pa. 【Features】 ■ For ultra-high vacuum areas ■ No atmospheric contamination ■ Excellent heat tolerance ■ Easy maintenance *For more details, please refer to the PDF document or feel free to contact us.
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【Specifications (Excerpt)】 ■ Operating vacuum range: Atmospheric pressure to approximately 10^-7 Pa ■ Leakage rate when valve is fully closed: 6.7×10^-11 Pa·m3/sec or less ■ Orifice diameter: φ8.5mm ■ Allowable heating temperatures ・ When valve is open: 150℃ ・ When valve is closed: 125℃ ■ Connection flange: φ70 ICF, NW25 flange ■ Weight: 0.5kg *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Canon Anelva has been honing its skills in the ultra-high vacuum field, which requires advanced technological capabilities, since its establishment in 1967 as a developer and manufacturer of vacuum thin film formation equipment and vacuum components. As a company expanding its business globally, we aim to contribute to the development of international society under the corporate philosophy of "coexistence" advocated by the Canon Group. Moving forward, we will continue to strive to create high value-added products based on solid technological capabilities and play a role in the advancement of electronics.