A small silicon MEMS chip is used in the pressure sensor section. It minimizes the influence of external environments, allowing for high-precision and stable measurement of absolute pressure.
Temperature-compensated diaphragm vacuum gauge, capacitance gauge 'M-342DG' 【Features】 ■ High precision and stable pressure measurement - Excellent zero point stability - Low temperature dependence - Excellent vibration resistance ■ Compact and low power consumption - Lightweight and compact with a mass of 200g and dimensions of W46mm × H49mm × L106mm - Power consumption of 0.5W *For more details, please refer to the PDF document or feel free to contact us.
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【Lineup】 ■M-342DG-1D ■M-342DG-1N ■M-342DG-11 ■M-342DG-12 ■M-342DG-13 *For more details, please refer to the PDF document or feel free to contact us.
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【Applications】 ■ Semiconductor manufacturing equipment, panel display manufacturing equipment, various vacuum devices, etc. *For more details, please refer to the PDF document or feel free to contact us.
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Canon Anelva has been honing its skills in the ultra-high vacuum field, which requires advanced technological capabilities, since its establishment in 1967 as a developer and manufacturer of vacuum thin film formation equipment and vacuum components. As a company expanding its business globally, we aim to contribute to the development of international society under the corporate philosophy of "coexistence" advocated by the Canon Group. Moving forward, we will continue to strive to create high value-added products based on solid technological capabilities and play a role in the advancement of electronics.