Easy selection of installation location! Pressure measurement up to process pressure (measurable in the range of 1 Pa) can be performed with a single gauge.
The "Miniature Gauge" is a metal small gauge ball that eliminates the disadvantages of glass gauge balls, which are large and prone to breaking. It is easy to select the installation location, and it can be miniaturized (1/20 of the conventional size according to our company) without compromising the performance of the gauge, such as sensitivity and measurement range. Pressure measurement from the target pressure to process pressures like sputtering (measurable in the range of 1 Pa) can be performed with a single gauge. 【Lineup】 ■ MG-2 ■ MG-2M ■ MG-2I/NW16, 25 ■ MG-2I/φ34ICF, φ70ICF ■ MG-2F ■ MG-2WF *For more details, please refer to the PDF materials or feel free to contact us.
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basic information
【Specifications (Excerpt)】 ■Body Material: SUS304 ■Sensitivity: 0.045Pa^-1 ■Measuring Sphere Volume: Approximately 12cc ■Degassing Method: Grid Electrification *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Canon Anelva has been honing its skills in the ultra-high vacuum field, which requires advanced technological capabilities, since its establishment in 1967 as a developer and manufacturer of vacuum thin film formation equipment and vacuum components. As a company expanding its business globally, we aim to contribute to the development of international society under the corporate philosophy of "coexistence" advocated by the Canon Group. Moving forward, we will continue to strive to create high value-added products based on solid technological capabilities and play a role in the advancement of electronics.
