NM_【Adopted by domestic semiconductor manufacturing companies】 Vacuum-compatible ultrasonic motor
Ultrasonic motors for semiconductor manufacturing equipment by Nanomotion
[Adopted by domestic semiconductor manufacturers] An ultrasonic motor used in semiconductor manufacturing that combines high-speed movement and precise positioning in a vacuum.
Nanomotion's ultrasonic motors come in various sizes and are suitable for environments ranging from atmospheric pressure to ultra-high vacuum. We have built motion platforms for a wide range of applications, from various micro-stages in the semiconductor industry to 300mm wafer inspection stages. The features of Nanomotion's ultrasonic motors include backlash-free direct drive, allowing the stage to be held even without power. The motor alone can provide a driving force of up to 32N, but in situations where more torque is needed, multiple ultrasonic motors can be installed to increase the driving force. They can also be used in high vacuum environments, and a non-magnetic model is available for ion beam applications. ■ SE Motor (Latest Model) Speed range of 1μm to 500mm/sec, sub-nanometer step resolution, maximum driving force of 32N. This ultrasonic motor was developed with Nanomotion's involvement in a development consortium for 7nm processes and has garnered attention from domestic manufacturers. ■ HR Motor (Standard Model) Speed range of 1μm to 250mm/sec, 1nm step resolution, maximum driving force of 32N. This ultrasonic motor is widely used by domestic manufacturers.
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basic information
【Main Ultrasonic Features】 ■ HR Motor (Standard Type) Speed range of 1μm to 250mm/sec, step resolution of 1nm, maximum driving force of 32N ■ SE Motor (Latest Type) Speed range of 1μm to 500mm/sec, sub-nm step resolution, maximum driving force of 32N
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Applications/Examples of results
【Representative Stage Prototype and Development Examples (Domestic and International)】 ○ 4-axis (X-Y-Z-T) stage for ion beam (FIB) inspection ○ 1nm multi-axis precision stage for semiconductor manufacturing evaluation ○ Drive module for lenses used in wafer inspection ○ Multi-axis stage for optical wafer inspection
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Company information
A workshop skilled in servo control. ○ In hydraulic servo control, we design and manufacture control devices, create control software, and collaborate with partner companies to design and produce optimal hydraulic units and hydraulic cylinders. We also select components such as hydraulic servo valves. ○ High-speed movement and high-precision positioning using ultrasonic motors. ○ Utilization in robots and unmanned transport vehicles with drivers for servo motors. ○ Controllers and control devices for construction machinery developed through contract development. ○ Creating moving objects such as hydraulic robots and designing and manufacturing 2-axis or 6-axis motion bases through industry-academia collaboration.