We will provide proposals tailored to our customers' needs based on fluorine-based cleaning specialized in the field of ultra-precision cleaning.
At Shin Ootsuka Co., Ltd., we will verify in advance whether the cleaning precision of the parts in question meets your satisfaction by testing the product in our "Test Room" with the necessary solvents at the inquiry stage. In addition to cleaning equipment, we also have various analytical devices as listed below. For more details, please feel free to contact us. 【Various Analytical Devices】 ■ Electronic Balance ■ Metal Microscope ■ Particle Counter ■ Oil Content Measuring Device, etc. *For more information, please refer to the related links page or feel free to contact us.
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【Analysis Equipment Specifications (Partial)】 <YPI-N Series (Automatic Transport) Wafer Surface Inspection System> ■ Supported substrate size: Maximum 200mm × 200mm ■ Scanning method: X-Y scan / θ-X scan (spiral scan) ■ Throughput: Approximately 4 minutes for 200mm / Approximately 3 minutes for Φ200mm ■ Work device: Transport robot (backside suction / edge clamp) ■ Equipment dimensions: W1,320mm × D1,000mm × H1,700mm ■ Main body weight: Approximately 800 kg, etc. *For more details, please refer to the related link page or feel free to contact us.
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Shin Otsuka Co., Ltd. aims to achieve higher cleaning performance and lower costs while minimizing the environmental impact on the Earth from the perspective of environmental protection as a comprehensive manufacturer of precision cleaning equipment. We will continue to deliver systems that meet your needs, including a fluorinated solvent-compatible cleaning system equipped with a unique cleaning agent recycling mechanism, ultrapure water cleaning systems, and hydrocarbon-based cleaning systems.