Transportable regardless of the microscope manufacturer!
The "YAT Series" is a system that allows for the automatic transport and automatic imaging of wafer and glass-related products, regardless of the microscope manufacturer, on the inspection side. It can achieve full automatic transport in combination with an automatic stage, and it can also operate as a standalone unit in manual transport mode. Please feel free to contact us if you have any requests. 【Features】 ■ Complete automatic transport by cassette unit using dedicated software ■ Selection of measurement wafers and manual transport possible on the transport side ■ Achieves efficient takt time through a wafer detection system ■ Capable of automatic imaging of 25 images through automatic stage and camera control ■ Proven track record of accommodating parts other than wafers *For more details, please download the PDF or contact us.
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basic information
【Specifications】 ■Standard Specifications ・Wafer Carrier Mapping ・Wafer Protrusion Detection ・Error Number Display ■Options ・Electrostatic Countermeasures (Ionizer) ・Cleanliness Improvement Measures (HEPA/ULPA) ・Support for Sample Size and Shape ・Shared Wafer Size (up to 2 types) ・Support for Multiple Cassettes *For more details, please download the PDF or contact us.
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Our company offers sales, rental, and repair of microscopes, as well as proposals for total inspection and analysis systems for factory and office environment equipment. Focusing primarily on corporations such as factories and universities, we provide better systems leveraging our extensive sales experience. Please feel free to contact us if you have any inquiries.