The target gases are N2, Air, O2, CO2, etc.! It corresponds to a very small flow rate from F.S. 1 SCCM based on N2.
We would like to introduce our high-grade mass flow meter, the 'MODEL 3100 SERIES'. It supports very low flow rates starting from F.S. 1 SCCM when converted to N2. The applicable fluids include N2, Air, H2, He, Ar, O2, CO2, etc., with a maximum flow rate ranging from 1 SCCM to 20 SLM. Please feel free to consult us when you need assistance. 【Features】 ■ Applicable fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases from 1 SCCM to 20 SLM ■ Accuracy: ±1% F.S. ■ Supports very low flow rates (starting from F.S. 1 SCCM when converted to N2) *For more details, please refer to the PDF document or feel free to contact us.
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【Standard Specifications (Excerpt)】 ■Sensor Type: Thermal Wire Sensor ■Maximum Inlet Pressure: 500 kPa (G) ■Pressure Resistance: 1 MPa (G) ■Permissible Ambient Temperature: 0 to 50℃ ■Electrical Connection: D-sub 9-pin KFC standard (compliant with SEMI standard) ■Weight: Approximately 800g *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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The environment surrounding the Earth consists of gases and liquids. The technology to measure, control, and generate these is essential for the development of society and industry, and can be considered a foundation that supports the next generation of manufacturing. For over 70 years, Kofloc has been exploring measurement and control technology primarily for small fluid volumes under the motto "Science of Fluids." We have built trust across diverse fields and now boast a top domestic market share in various sectors. Kofloc continues to challenge itself with new technologies that create a future for people and the Earth, striving to realize a rich life for everyone.