Million Actuator Ultra-Compact 15-Sided Size

For adjusting the X, Y, and θ axes of the alignment stage! Achieving both ultra-high precision and compactness.

The "Million Actuator Ultra-Compact 15-Sided Size" is a linear actuator with ultra-high precision and high rigidity performance. By adopting a high-precision wide roller, it achieves more than three times the rigidity compared to conventional ball types due to its larger contact area. Additionally, it has succeeded in reducing the pre-load while maintaining rigidity. This has minimized rolling resistance to the extreme, achieving a feed accuracy of 1μm. Leveraging its high feed accuracy, the Million Guide is used for high-precision positioning of mirrors, lenses, and tables in exposure machines. 【Features】 ■ Achieves both ultra-high precision and compactness ■ Ultra-compact 15-sided size ■ New design based on black and gold ■ Adoption of high-precision wide rollers ■ Successful reduction of pre-load while maintaining rigidity *For more details, please refer to the PDF document or feel free to contact our offices located in Tokyo, Tama, Kanagawa, Kumagaya, Tochigi, and Yamagata.

Actuator