For adjusting the X, Y, and θ axes of the alignment stage! Achieving both ultra-high precision and compactness.
The "Million Actuator Ultra-Compact 15-Sided Size" is a linear actuator with ultra-high precision and high rigidity performance. By adopting a high-precision wide roller, it achieves more than three times the rigidity compared to conventional ball types due to its larger contact area. Additionally, it has succeeded in reducing the pre-load while maintaining rigidity. This has minimized rolling resistance to the extreme, achieving a feed accuracy of 1μm. Leveraging its high feed accuracy, the Million Guide is used for high-precision positioning of mirrors, lenses, and tables in exposure machines. 【Features】 ■ Achieves both ultra-high precision and compactness ■ Ultra-compact 15-sided size ■ New design based on black and gold ■ Adoption of high-precision wide rollers ■ Successful reduction of pre-load while maintaining rigidity *For more details, please refer to the PDF document or feel free to contact our offices located in Tokyo, Tama, Kanagawa, Kumagaya, Tochigi, and Yamagata.
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【Specifications (Excerpt)】 ■Model: GMA1506A ■Mounting Angle: 15×15mm ■Effective Stroke: 6mm ■Axial Thrust ・Rated: 20N ・Maximum: 40N ■Feed Screw: Precision Ground Ball Screw Class C3 *For more details, please refer to the PDF document or feel free to contact us as we have offices in Tokyo, Tama, Kanagawa, Kumagaya, Tochigi, and Yamagata.
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Applications/Examples of results
【Applications】 ■ Movement of lenses and mirrors in various optical devices, fine angle adjustment ■ Adjustment of X, Y, and θ axes in alignment stages ■ Focus and position adjustment of cameras, etc. *For more details, please refer to the PDF document or feel free to contact us.
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Our company is engaged in the sale of precision machinery parts and equipment systems. We mainly handle bearing-related equipment, linear motion-related equipment, pneumatic and hydraulic-related equipment, electronic and mechanical components and control devices, transmission-related equipment, and conveying-related equipment. ■ Business Locations and Sales Offices - Headquarters, Headquarters Sales Department - Tokyo Sales Office - North Kanto Sales Office (Tochigi) - Kumagaya Sales Office - Yamagata Sales Office Please feel free to contact us if you have any requests.