【For ~300mm wafers】 High mobility transport and wide-range operation possible! The high-speed power line communication technology reduces the number of internal wiring in the robot body and the number of external cables.
■ By utilizing high-speed power line communication technology, the number of internal wiring and external cables in the robot body has been significantly reduced. ■ By integrating the servo amplifier into the robot, the controller has been miniaturized. ■ Due to the capability of high portable transport (total mass of hand holder, hand, and transport work is 4kg), the implementation of a reversing axis has been achieved. It is capable of tape frame wafer transport, bonded wafer transport, and reticle transport. ■ Work gripping can accommodate three methods: vacuum suction, edge clamp using pneumatic pressure, and Bernoulli method. ■ The Bernoulli hand is expected to support contact gripping of the back surface of the outer circumference of TAIKO wafers. * For more details, please refer to the PDF materials or feel free to contact us.
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basic information
【Specifications】 ■Operating Range ・X1, X2-axis: 500mm ・θ-axis: 340° ・Z-axis: 300mm or 450mm ■Maximum Operating Speed ・X1, X2-axis: 1000mm/sec ・θ-axis: 200°/sec ・Z-axis: 250mm/sec ■Repeat Position Accuracy: ±0.1mm in each XYZ direction ■Payload: 4.0kg/arm (Including E/E, E/E-base, Wafer) ■Main Body Weight: 50kg *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
Line up（2）
| Model number | overview |
|---|---|
| UT-AFW4010NM | Category: Long Arm Type Load Capacity: 1kg/2N･m |
| UT-AFW4000NM | Category: High Payload Type Load Capacity: 4kg/8N･m |
catalog（1）
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Company information
Since its establishment in 1919, Daihen has been engaged in the development of products that society needs, such as transformers, welding machines, industrial robots, and high-frequency power supplies for semiconductor manufacturing equipment, contributing to the advancement of power infrastructure that forms the foundation of daily life and the evolution and development of global manufacturing. Now, as a new step, we aim to become a "research and development-oriented company" that directly addresses social issues. Through the development of energy management systems that contribute to the expansion of renewable energy use, charging infrastructure essential for the spread of EVs, and new bonding processes that aid in vehicle weight reduction, we are committed to realizing a decarbonized society with our "Green Solutions." Additionally, we aim to contribute to addressing "labor shortages" and the "diversification of workers and work styles" by providing optimal solutions tailored to the specific circumstances of our manufacturing customers through "Tailored Solutions," which are essentially "custom-made" robotic systems. By focusing on these areas and strengthening our development efforts, we will continue to introduce products with unique value to the market, striving to bring even more joy to our customers and serve society effectively.