Equipped with a direct drive motor for wafers up to 300mm! A high-precision single-arm vacuum robot that significantly reduces vibration.
- By incorporating a direct drive motor and a steel belt within the arm, ultra-high precision transport and significant vibration reduction during arm operation are achieved. - The adoption of a partition-type vacuum seal allows for compatibility in ultra-high vacuum environments. - The endless specification of the swivel axis improves the throughput of the device. - The built-in controller enables miniaturization of the device. - Equipped with a wafer center position deviation correction function. *For more details, please refer to the PDF document or feel free to contact us.
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basic information
■Operating Range ・X-axis 850mm ・θ-axis Endless ・Z-axis - ■Operating Time ・X-axis 2.0sec / 850mm ・θ-axis 2.5sec / 180° ・Z-axis - ■Repeat Position Accuracy ・XY direction φ0.02mm (3σ) ・Z direction - ■Payload: 1.0kg (Including E/E, E/E-base, Wafer) ■Body Weight: 29kg ■Installation Environment ・Temperature 5-40℃ (Body) / 5-80℃ (Arm) ・Humidity 20-70%, No condensation ・Pressure Atmospheric pressure ～ 10-7Pa For more details, please refer to the PDF document or feel free to contact us.
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Company information
Since its establishment in 1919, Daihen has been engaged in the development of products that society needs, such as transformers, welding machines, industrial robots, and high-frequency power supplies for semiconductor manufacturing equipment, contributing to the advancement of power infrastructure that forms the foundation of daily life and the evolution and development of global manufacturing. Now, as a new step, we aim to become a "research and development-oriented company" that directly addresses social issues. Through the development of energy management systems that contribute to the expansion of renewable energy use, charging infrastructure essential for the spread of EVs, and new bonding processes that aid in vehicle weight reduction, we are committed to realizing a decarbonized society with our "Green Solutions." Additionally, we aim to contribute to addressing "labor shortages" and the "diversification of workers and work styles" by providing optimal solutions tailored to the specific circumstances of our manufacturing customers through "Tailored Solutions," which are essentially "custom-made" robotic systems. By focusing on these areas and strengthening our development efforts, we will continue to introduce products with unique value to the market, striving to bring even more joy to our customers and serve society effectively.