Single-arm vacuum robot for ~300mm wafers, with options for arm length and presence of Z-axis.
■Standard support for two types of arm lengths. You can also choose whether or not to include the Z-axis, allowing for various device layouts. *For more details, please refer to the PDF document or feel free to contact us.*
Inquire About This Product
basic information
【Specifications】 ■Operating Range ・X-axis: 720mm ・θ-axis: 340° ・Z-axis: 20mm ■Maximum Operating Speed ・X-axis: 250°/sec ・θ-axis: 220°/sec ・Z-axis: 121mm/sec ■Repeat Position Accuracy: ±0.1mm in each XYZ direction ■Payload Capacity: 0.7kg (Including E/E, E/E-base, Wafer) ■Body Weight: 35kg ■Installation Environment ・Temperature: 10-40℃ (Atmosphere side) / 0-80℃ (Vacuum Seal Unit) ・Humidity: 20-70%, No condensation ・Pressure: Atmospheric pressure ～ 10-6Pa *For more details, please refer to the PDF document or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
For more details, please refer to the related links or feel free to contact us.
Line up（2）
| Model number | overview |
|---|---|
| UT-VFX3000NM | Category: Standard Type |
| UT-VFX3010NM | Category: Long Arm Type |
catalog（1）
Download All Catalogs![[Catalog] Clean Transport Robot](https://image.mono.ipros.com/public/catalog/image/01/297/696201/IPROS44399488380954255397.jpeg?w=120&h=170)
Company information
Since its establishment in 1919, Daihen has been engaged in the development of products that society needs, such as transformers, welding machines, industrial robots, and high-frequency power supplies for semiconductor manufacturing equipment, contributing to the advancement of power infrastructure that forms the foundation of daily life and the evolution and development of global manufacturing. Now, as a new step, we aim to become a "research and development-oriented company" that directly addresses social issues. Through the development of energy management systems that contribute to the expansion of renewable energy use, charging infrastructure essential for the spread of EVs, and new bonding processes that aid in vehicle weight reduction, we are committed to realizing a decarbonized society with our "Green Solutions." Additionally, we aim to contribute to addressing "labor shortages" and the "diversification of workers and work styles" by providing optimal solutions tailored to the specific circumstances of our manufacturing customers through "Tailored Solutions," which are essentially "custom-made" robotic systems. By focusing on these areas and strengthening our development efforts, we will continue to introduce products with unique value to the market, striving to bring even more joy to our customers and serve society effectively.