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**Abstract** In recent years, there has been a growing demand for high-sensitivity and low-power consumption devices, leading to increased attention on magnetic memory and magnetic sensors in the field of spintronics. These devices widely utilize the MTJ (magnetic tunnel junction) structure due to its ability to achieve high magnetoresistance effects. The MTJ structure consists of thin layered films on the order of a few nanometers, where the film thickness, roughness, and crystallinity at the atomic level significantly influence the properties. Additionally, since the magnetic characteristics change with annealing temperature, this paper presents a case study using in-situ TEM to analyze the changes in crystallinity and elemental distribution during heating at the nanometer level. **Table of Contents** 1. Introduction 2. Samples and Evaluation Methods 3-1. Changes in Crystallinity 3-2. Analysis of Crystal Orientation 3-3. Analysis of In-Plane Crystal Orientation 4. Conclusion 5. Acknowledgments 6. Closing Remarks
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Technical Information Magazine The TRC News "Heating Analysis of MTJ Films Using in-situ STEM" 【Abstract】 As the demand for high-sensitivity and low-power devices increases, magnetic memory and magnetic sensors are gaining attention in the field of spintronics. The MTJ (magnetic tunnel junction) structure is widely used in these devices due to its ability to achieve high magnetoresistance effects. This MTJ structure consists of thin layered films on the order of a few nanometers, where the film thickness, roughness, and crystallinity at the atomic level significantly influence the properties. Additionally, since the magnetic characteristics change with annealing temperature, this paper presents a case study analyzing the changes in crystallinity and elemental distribution during heating at the nanometer level using in-situ TEM. 【Table of Contents】 1. Introduction 2. Samples and Evaluation Methods 3-1. Changes in Crystallinity 3-2. Analysis of Crystal Orientation 3-3. Analysis of In-Plane Crystal Orientation 4. Conclusion 【Figures and Tables】 Figures 1 to 7 Relationship between Annealing Temperature and TMR Ratio BF-STEM images, FFT patterns, and EELS line profiles obtained from in-situ heating measurements Results of in-situ ACOM-TEM measurements Results of ACOM-TEM measurements in the planar direction
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