Temperature fluctuation accuracy can be achieved from 0.1℃ to 0.002℃! We also accommodate requests for low humidity specifications of 5-40% RH.
The "Thermal Clean Chamber" is an internal device for clean rooms with a cleanliness level of ISO Class 4 (Class 10). It employs a PID control, ultra-precise components, and an airflow system tailored for temperature accuracy, with temperature fluctuation precision possible from 0.1℃ to 0.002℃. Additionally, humidity control is available not only in the standard specification range of 40-60% RH but also in response to requests for low humidity specifications of 5-40% RH. 【Features】 ■ Cleanliness level of ISO Class 4 (Class 10) ■ Temperature control possible within ±0.1℃ to ±0.005℃ ■ Customizable design to fit built-in devices ■ Safety considerations through multiple protection circuits *For more details, please refer to the PDF document or feel free to contact us.
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【Types】 ■ Type C (Enclosure Type) ■ Type B (Open Type) ■ Type S (Separated Type) *For more details, please refer to the PDF document or feel free to contact us.
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【Applications】 ■ Semiconductor manufacturing: Steppers (reduction projection exposure equipment), aligners, electron beam lithography equipment ■ Display panel manufacturing: LCD panels, plasma displays, organic EL ■ Precision machining: Mirror polishing machines, laser processing machines, magnetic head cutting machines, etc. ■ Precision measuring instruments: Precision length measuring machines, 2D and 3D measuring machines ■ Biologically: Precision microscopes, handling of samples sensitive to temperature and humidity changes, etc. *For more details, please refer to the PDF materials or feel free to contact us.
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As the only clean air system specialized manufacturer in Japan, we provide a comprehensive range of products and highly specialized technical expertise to offer clean-related products globally. - Reliable technical capabilities based on years of experience and a two-year domestic warranty. - You can also trust us for global support! - We have a wide variety of products to meet diverse industries and needs.