Optimal temperature management for exposure devices - Apiste's precision air conditioning unit PAU series.

Simply place and connect to easily achieve precise air conditioning. The Apiste PAU series of precision air conditioning units allows for flexible temperature control in enclosed spaces.

【Optimal Temperature Management for Exposure Equipment】Precision Air Conditioning Unit PAU Series In exposure equipment, it is necessary to supply cold air to stabilize the temperature and suppress the expansion and contraction of the photomask. With the Precision Air Conditioning Unit PAU Series, air with the required temperature, humidity, and cleanliness can be achieved. ーーーーーーーーーーーーーーーーーーーーーーーーーーーーーー The 'PAU Series' for localized air conditioning can reduce energy consumption compared to whole-room air conditioning, enabling not only high-precision temperature management but also precise control of humidity, ranging from low to high humidity environments as needed. Additionally, by combining with a fan filter unit, it is possible to easily achieve a wide range of cleanliness management. 【Features of Precision Air Conditioning Units】 ■ Temperature Control ±0.1℃ ■ Humidity Control ±0.5% RH ■ Cleanliness Control Class 10 to Class 10000 ■ Flexible response to changes in manufacturing line specifications and layouts

Dust collector