Precision control through moving coil drive! Achieving high-speed response with a lightweight guide valve.
We would like to introduce our "VCM-driven (direct acting) pneumatic servo valve." This is a spool-type servo valve that uses a movable coil type force motor in the electrical-mechanical conversion section. It performs precise control through moving coil drive and is mainly used in the field of semiconductor manufacturing equipment (such as precision positioning stages). We offer "flow control 3-way valves/5-way valves" and "pressure control 3-way valves." 【Features】 ■ High flow rate ■ High resolution, low hysteresis ■ Low error and long lifespan due to static pressure bearings ■ Minimal internal leakage ■ High-speed response achieved with lightweight guide valves ■ Position control (flow control valve) using digital or analog sensors *For more details, please refer to the PDF materials or feel free to contact us.
Inquire About This Product
basic information
【Specifications (Partial)】 ■AS310S (Flow Control 3-Way Valve) ・Rated Pressure: 600 kPa ・Rated Flow: 200 NL/min ・Rated Current: 1.0 A ■AS311S (Flow Control 5-Way Valve) ・Rated Pressure: 600 kPa ・Rated Flow: 200 NL/min ・Rated Current: 1.5 A *For more details, please refer to the PDF document or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
For more details, please refer to the PDF document or feel free to contact us.
catalog（1）
Download All Catalogs
Company information
Our company is engaged in the research, development, design, manufacturing, and sales of high-precision pneumatic servo valves. In addition to our existing lineup, we also accept development requests tailored to customer needs and applications. In the field of pneumatics, where fine control is extremely challenging, we have achieved high-precision servo control, which is primarily adopted in semiconductor manufacturing equipment and railway vehicles. We also manufacture some hydraulic equipment, and our servo valves are actively used in testing machines, general industrial machinery, and robotics. Furthermore, we handle not only the hardware aspects such as servo valves and actuators but also the software components like drive amplifiers and controllers, allowing us to provide these as an integrated system. We have established a factory within the company, creating an environment where we can deeply pursue manufacturing and quickly realize our customers' requests. We will continue to strive daily to be a professional group in pneumatic servos. Please feel free to contact us with any requests.