Wide-area wet etching manufacturing etching simulator

A bidirectional simulator that performs etching manufacturing finish calculations and automatic corrections. It rapidly calculates etching phenomena for panel sizes, achieving improvements in manufacturing yield.

1. A high-speed etching simulator that calculates the etching phenomenon over time (dt). 2. A bidirectional simulator that performs manufacturing finish shape calculations and generates correction data. Supports the generation/verification of correction data and is compatible with manufacturing finish calculations using correction data from other companies. 3. Achieves wide-area calculations for panel sizes (500mm x 600mm) with 16GB of memory. 4. Calculates etching pressure in a 2.5-dimensional manner from resist distribution, automatically calculating changes in areas where the resist gap varies significantly, such as notches and corner rounding. The degree of change can be adjusted with parameters. 5. Automatically partially stops correction calculations when the calculation steps progress and the correction data approaches abnormally close. Automatically generates correction data that does not violate the specified DRC values. 6. CAD data input/output for DXF, Gerber, ODB++, GDSII, etc. Also supports mutual conversion of CAD data. 7. Achieves high-quality calculation results with easy operation.

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