There are over 1,000 units delivered both domestically and internationally using the bubbling spray method! It is a highly reliable large-capacity exhaust scrubber for indoor installation.
We have a track record of over 1,000 units delivered both domestically and internationally!! Tohsetsu is a highly reliable leading manufacturer of indoor large-capacity scrubbers. ■ Feature 1: Maximum flow rate of 60m³/min We have delivered over 100 large SCRs for indoor use with a flow rate of over 20m³/min. ■ Feature 2: Corrosion prevention with corrosion-resistant fans Particularly, the fan impeller section is designed with gas sealing and corrosion prevention measures. ■ Feature 3: Negative pressure cover for central scrubbers Can be used even when the negative pressure in the central scrubber is low due to the use of fans. ■ Feature 4: Material can be changed according to gas type SUS is used for organic gases, and PVC is used for inorganic gases.
Inquire About This Product
basic information
It is a conventional bubbling shower type, optimal for small to large flow gas treatment (up to 60m³/min). The target gases include Cl2, HF, HCl, HNO3, NH4, CVD combustion exhaust gases, and both organic and inorganic gases, with the possibility of supplying NaOH solution.
Price range
Delivery Time
Applications/Examples of results
■Purpose: - Gas removal from the wet cleaning device, wet etching device, post-stage of combustion abatement device, CVD, epitaxial growth, and equipment from the cylinder cabinet. Can also be used as an emergency abatement device. - Maximum gas flow rate: ~60m3/min ■Target gases: Cl2, HF, HCl, HNO3, NH4, CVD combustion exhaust gases, organic and inorganic gases.
catalog（1）
Download All Catalogs
Company information
Tosetsu is a development-oriented equipment venture that provides equipment primarily for semiconductor, electronic device, and LCD manufacturers, including "automatic electroplating/non-electroplating plating equipment," "exhaust gas treatment equipment," "wet process equipment," and "degasification systems." In addition to design development and manufacturing sales, we also offer process support & consulting, demonstration, prototyping, contract processing, and maintenance modification services. We look forward to your contact with Tosetsu, a venture that loves free thinking.
![[Pure Cleanser Installation Example] Scrubber](https://image.mono.ipros.com/public/product/image/5bf/2000391157/IPROS582127006998541998.jpg?w=280&h=280)
![[SDGs] Future-type ⭐ Water Wash Toilet Asuthia](https://image.mono.ipros.com/public/default/object/noimage_l.gif?w=280&h=280)
![[Information] Common Concerns When Introducing Neutralization Treatment Equipment and Our Approach](https://image.mono.ipros.com/public/product/image/2048980/IPROS10907577214616863567.png?w=280&h=280)