There are over 1,000 units delivered both domestically and internationally using the bubbling spray method! It is a highly reliable large-capacity exhaust scrubber for indoor installation.
We have a track record of over 1,000 units delivered both domestically and internationally!! Tohsetsu is a highly reliable leading manufacturer of indoor large-capacity scrubbers. ■ Feature 1: Maximum flow rate of 60m³/min We have delivered over 100 large SCRs for indoor use with a flow rate of over 20m³/min. ■ Feature 2: Corrosion prevention with corrosion-resistant fans Particularly, the fan impeller section is designed with gas sealing and corrosion prevention measures. ■ Feature 3: Negative pressure cover for central scrubbers Can be used even when the negative pressure in the central scrubber is low due to the use of fans. ■ Feature 4: Material can be changed according to gas type SUS is used for organic gases, and PVC is used for inorganic gases.
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basic information
It is a conventional bubbling shower type, optimal for small to large flow gas treatment (up to 60m³/min). The target gases include Cl2, HF, HCl, HNO3, NH4, CVD combustion exhaust gases, and both organic and inorganic gases, with the possibility of supplying NaOH solution.
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Applications/Examples of results
■Purpose: - Gas removal from the wet cleaning device, wet etching device, post-stage of combustion abatement device, CVD, epitaxial growth, and equipment from the cylinder cabinet. Can also be used as an emergency abatement device. - Maximum gas flow rate: ~60m3/min ■Target gases: Cl2, HF, HCl, HNO3, NH4, CVD combustion exhaust gases, organic and inorganic gases.
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Company information
Tosetsu is a development-oriented equipment venture that provides equipment primarily for semiconductor, electronic device, and LCD manufacturers, including "automatic electroplating/non-electroplating plating equipment," "exhaust gas treatment equipment," "wet process equipment," and "degasification systems." In addition to design development and manufacturing sales, we also offer process support & consulting, demonstration, prototyping, contract processing, and maintenance modification services. We look forward to your contact with Tosetsu, a venture that loves free thinking.