Semiconductor manufacturing equipment with high corrosion-resistant anodizing on flanges, valves, and bodies.
High corrosion-resistant anodized goat mite reduces costs and decreases internal corrosion! The generated particles are suppressed!
1. A dense layer of approximately 1μm is formed on the surface of the film. 2. The dense layer acts as a cover that seals the pore surfaces, protecting the film from etching gases and corrosive solutions within semiconductor manufacturing equipment. 3. It has about five times the corrosion resistance of oxalic acid anodized (our treatment). 4. Due to its excellent sealing properties, there is no mass loss even after anodizing. 5. It has over 400 times the corrosion resistance compared to oxalic acid anodized (our treatment) when immersed in hydrochloric acid. 6. It excels in plasma resistance, resulting in over 10% less etching compared to oxalic acid anodized (our treatment). 【Features】 ■ Improved durability ■ Cost reduction ■ Reduced internal corrosion ■ Reduced particle generation *For more details, please refer to the PDF document or feel free to contact us.
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【Yagimaito Processing Features】 ■ A hydrated oxide layer is formed inside the fine pores and on the upper layer with a thickness of 1μm. ■ Excellent alkali resistance, with corrosion resistance approximately five times greater than conventional methods. ■ Superior sealing performance, with no mass loss. ■ Plasma resistance improved by 1.3 times compared to conventional anodized coatings. *For more details, please refer to the PDF document or feel free to contact us.
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■ Semiconductor manufacturing equipment, etc. *For more details, please refer to the PDF document or feel free to contact us.
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China Electric Chemical Industry Co., Ltd. is a global company based in Yamaguchi that challenges future technologies. We perform metal surface treatments, including anodizing. With our unique technology, we specialize in surface treatment of aluminum used in semiconductor manufacturing equipment. We are always conscious of carbon neutrality, strive to prevent pollution, and work hard to protect and preserve the global environment.