Significant improvement in design efficiency! Introducing examples of achieving time reduction and quality enhancement.
We would like to introduce a case where a prescale was utilized to confirm the uniformity of the CMP polishing head. Continuing production without a clear understanding of the causes of polishing defects led to issues such as insufficient precision and frequent occurrences of defective products. After implementation, we achieved time savings and quality improvement by gaining useful insights into polishing uniformity and the adjustment of polishing speed. 【Case Overview】 ■Challenges - Insufficient precision - Frequent occurrences of defective products ■Results - The uniformity of the contact area could be adjusted during the design phase, significantly improving design efficiency. - We were able to reduce variability between CMP devices. *For more details, please refer to the PDF document or feel free to contact us.
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【Results】 ■Reduction in polishing time ■Improvement in polishing quality ■Improvement in acceptance quality of equipment shipments *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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