We will showcase positioning stage systems for microscopes used in semiconductor manufacturing and inspection.
The ultrasonic motors from Nanomotion, handled by Kōen, can achieve both high-speed movement and precise positioning for positioning stages. Stages utilizing these ultrasonic motors have a proven track record in applications such as electron beam/ion beam stages and light sheet microscopes. These positioning stages are designed based on user specifications by Nanomotion, and we also manufacture and supply them as units. We will be exhibiting a stage system using these ultrasonic motors at "SEMICON Japan 2023," held at Tokyo Big Sight. [Exhibited Products] ■ Ultrasonic Motor (Piezo Motor) "HR Motor" (Demo available) ■ 4-axis stage for the semiconductor industry ■ 5-axis stage for light sheet microscopes We sincerely look forward to your visit.
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【Event Overview】 ■ Date: December 13 (Wed) to December 15 (Fri), 2023 10:00 AM to 5:00 PM ■ Location: Tokyo Big Sight, East Hall 5 ■ Booth Number: 5512 ■ URL: https://www.semiconjapan.org/jp *For more details, please feel free to contact us.
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Stage for electron beam, stage for ion beam, stage for digital microscope, stage for semiconductor inspection equipment.
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A workshop skilled in servo control. ○ In hydraulic servo control, we design and manufacture control devices, create control software, and collaborate with partner companies to design and produce optimal hydraulic units and hydraulic cylinders. We also select components such as hydraulic servo valves. ○ High-speed movement and high-precision positioning using ultrasonic motors. ○ Utilization in robots and unmanned transport vehicles with drivers for servo motors. ○ Controllers and control devices for construction machinery developed through contract development. ○ Creating moving objects such as hydraulic robots and designing and manufacturing 2-axis or 6-axis motion bases through industry-academia collaboration.
