Pressure measurement equipment in semiconductor manufacturing processes <chemical solutions and ultra-pure water>
Structure suitable for measuring liquid pharmaceuticals and ultra-pure water! Examples of applications for measuring liquid pharmaceuticals and cleaning water.
We will introduce examples of the use of pressure measurement devices in the measurement of chemical solutions and cleaning water. This includes level measurement of chemical solution tanks, monitoring of discharge pressure of chemical solutions, and monitoring of line pressure. It supports the efficient use of chemical solutions and ultra-pure water in the cleaning process. 【Wet Process Pressure Measurement Field】 ■ Ultra-pure water / High-functionality water ■ Hydrofluoric acid / Hydrochloric acid ■ Slurry ■ Resist liquid *For more details, please refer to the related links or feel free to contact us.
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basic information
【Pressure Measurement Equipment】 ■ Ultra-pure Water Measurement "KL91" ■ Chemical Solution Measurement "KL92・KL95" ■ High Corrosion Resistance "SL85" *For more details, please refer to the related links or feel free to contact us.
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For more details, please refer to the related links or feel free to contact us.
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The progress of computers, which can be likened to the human brain, is remarkable; however, the advancement of sensors, which can be compared to human senses, cannot be said to be on par with it. Nagano Keiki believes that the advancement of sensors is an important challenge that creates new cultures and opens our future. In the field of process instrumentation, we have gained significant achievements and trust in pressure, temperature, and measurement instruments. We are further leveraging our sensor technology and mechatronics technology in areas such as factory automation, the automotive industry, and information and communication, working on product development for "sensors," "actuators," and "control devices" that are suitable for new application fields.
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