Pressure measurement equipment in semiconductor manufacturing processes <Air conditioning system>
High-sensitivity measurement from an ultra-low differential pressure range (10 Pa)! A sensor that achieves high pressure resistance across the entire range of 50 kPa.
We would like to introduce examples of the application of pressure measurement equipment in the air conditioning systems of semiconductor manufacturing processes. Silicon capacitance sensors are available that can measure with high sensitivity from a micro differential pressure range (10 Pa) and achieve a high pressure resistance of 50 kPa across the entire range. We have started supporting IO-Link for micro differential pressure measurement, adapting to the evolution of air conditioning systems. 【Pressure Measurement Field in Air Conditioning Systems】 ■ Dry Air ■ N2 Gas ■ Exhaust Gas *For more details, please refer to the related links or feel free to contact us.
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The progress of computers, which can be likened to the human brain, is remarkable; however, the advancement of sensors, which can be compared to human senses, cannot be said to be on par with it. Nagano Keiki believes that the advancement of sensors is an important challenge that creates new cultures and opens our future. In the field of process instrumentation, we have gained significant achievements and trust in pressure, temperature, and measurement instruments. We are further leveraging our sensor technology and mechatronics technology in areas such as factory automation, the automotive industry, and information and communication, working on product development for "sensors," "actuators," and "control devices" that are suitable for new application fields.
![[Use Case] Pressure Measurement Equipment in Semiconductor Manufacturing Process <Gas Supply System>](https://image.mono.ipros.com/public/product/image/413/2001011924/IPROS43208655797897401611.png?w=280&h=280)
