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  6. Chiller PCU Series for Cooling Water Temperature Control in Etching and Sputtering

Chiller PCU Series for Cooling Water Temperature Control in Etching and Sputtering

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last updated:Jan 23, 2026

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The Apiste chillers are available in three series: non-Freon, high durability, and ultra-wide range! You can choose the optimal chiller according to your application.

【Etching and Sputtering Cooling Water Temperature Control】 Maintains a constant temperature, flow rate, and discharge pressure of the cooling water in the substrate cooling plate and vacuum chamber. ーーーーーーーーーーーーーーーーーーーーーーーーーーーーーー 【Three Series of Chillers to Choose From】 1. PCU-NE Series: Uses non-Freon refrigerants and is not subject to the Freon Emission Control Law. 2. PCU-SL Series: Achieves high durability for safe use even in harsh field environments. 3. PCU-R Series: Realizes a wide temperature control range of -10 to 80°C and ultra-high precision water temperature management of ±0.05°C. 【Features】 ■ Drive recorder and time calendar function (PCU-NE) ■ Temperature control using external temperature sensors (PCU-NE/R) ■ Easy water supply operations with a large-diameter tank (PCU-NE) ■ Reliable cooling performance ■ Standard Ethernet equipped to meet a wide range of communication needs!

    Chiller
エッチング、スパッタリングの冷却水温調.png

Chiller PCU Series for Cooling Water Temperature Control in Etching and Sputtering

エッチング、スパッタリングの冷却水温調.png
エッチング、スパッタリングの冷却水温調.png
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★Information on Related Seminars★ Apiste is currently offering free online seminars. Please check the links below. - Three Key Points for Introducing Chillers - Five Cooling Methods for Introducing Chillers

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【Case Studies】 ■ Mold Cooling ■ Semiconductor Manufacturing Equipment ■ Laser Processing Machine ■ Cooling of Vacuum Pumps ■ Spot Welding Machine ■ Arc Welding Machine ■ High-Frequency Induction Heating Device ■ Concentrator

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Chiller PCU Series Comprehensive Catalog

Chiller PCU Series Comprehensive Catalog

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"Apice," which means "peak" in Spanish. That peak represents "technology" = robust development capabilities, "product" = unmatched high quality, "sincerity" = human service. This spirit, depicted in the clear blue sky, has taken shape in reality, becoming distinctly outlined. And, looking further ahead. What lies in our vision is already the blue sky of the future. Aiming for a new peak.

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