Customization to fit your equipment is also possible! Efficient analysis even for complex models.
"Particle-PLUS" is a simulation software suitable for research, development, and manufacturing of devices, materials, and systems using plasma. It allows for fast results without the need to simulate the entire device by combining axisymmetric models and mirror-symmetric boundary conditions. It supports both 2D (two-dimensional) and 3D (three-dimensional) analyses, enabling efficient analysis even for complex models. 【Features】 ■ Specializes in low-pressure plasma analysis ■ Allows for fast results without the need to simulate the entire device by combining axisymmetric models and mirror-symmetric boundary conditions ■ Excels in plasma simulation for low-pressure gases, which are difficult to compute with fluid models ■ Supports both 2D (two-dimensional) and 3D (three-dimensional) analyses, enabling efficient analysis even for complex models ■ Customization to fit customer devices is possible as a strength of in-house developed software *For more details, please refer to the PDF document or feel free to contact us.
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basic information
Various calculation results output ■ Potential distribution ■ Density distribution/temperature distribution/generation distribution of electrons and ions ■ Particle flux and energy flux to the wall ■ Energy spectrum of electrons and ions at the wall ■ Density distribution/temperature distribution/velocity distribution of neutral gas *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Responding to Various Cases】 ■ Magnetron Sputtering ■ PVD, Plasma CVD ■ Capacitive Coupled Plasma (CCP) ■ Dielectric Barrier Discharge (DBD) ■ Electrophoresis *For more details, please refer to the PDF document or feel free to contact us.
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