Three-dimensional structure observation of MEMS devices.

Achieve high-resolution and high-contrast observation! Non-destructive 3D observation is possible.

The "MEMS" structure, which has a three-dimensional and movable component, is sealed in a hollow form. To observe this structure as it is, it is necessary to conduct observations without any processing such as opening it. The 3D X-ray microscope (X-ray CT) allows for non-destructive three-dimensional observation and is effective for quality analysis, defect analysis, and reverse engineering. 【Features of the 3D X-ray Microscope】 ■ Enables non-destructive three-dimensional observation of the internal structure of the object ■ By magnifying the X-rays that have passed through the sample with optical lenses, high-resolution and high-contrast observations are possible *For more details, please refer to the PDF document or feel free to contact us.

Other microscopes