[Example] Vacuum Deposition Device Testing System

Introduction of delivery examples of vacuum deposition device testing systems.

For the development of vacuum deposition technology, data related to vacuum deposition equipment is being used for monitoring purposes. We introduce a system delivery case that measures data such as temperature, vacuum level, pressure, heater voltage, and current using the "Wave Researcher" and Yokogawa Electric Corporation's data acquisition system "MX Series," with measurements taken as quickly as every 100 ms, allowing for the monitoring of equipment operation and data analysis. The operational status of the vacuum deposition equipment is measured with the "MX Series," and conditions for improving deposition speed and achieving uniform film thickness are being investigated. [Case Overview] - Measurement of data such as temperature, vacuum level, pressure, heater voltage, and current in as little as 100 ms - Monitoring of equipment operation and data analysis *For more details, please refer to the PDF document or feel free to contact us.

Other information systems