It is possible to analyze the elemental composition and chemical state of solid surfaces.
High-sensitivity elemental analysis of elements from Li to U can be performed in micro-regions with a depth of ≤5nm and a diameter of ≤10nm. Therefore, it is possible to analyze the elemental composition and chemical state of material surfaces, as well as thin films.
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basic information
In a vacuum, an electron beam is irradiated onto the sample, and the analysis of the excited electrons (Auger electrons) is conducted. Since Auger electrons possess characteristic kinetic energy specific to each element, the type of element can be identified by measuring the energy of the Auger electrons. Auger electrons are generated only from a depth of a few nanometers, allowing for the analysis of the outermost surface.
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Applications/Examples of results
Analysis of elemental composition and chemical state of material surfaces, analysis of thin films.
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Daitō Analysis Research has been advancing the establishment of an advanced think tank based on highly reliable analysis and analytical techniques accumulated in various material fields, as well as the challenges received from a wide range of industry customers. We aim to solve our customers' various issues with the least cost and the shortest delivery time. Moving forward, we would like to support our customers' research and development using the latest equipment and advanced manpower, and assist in creating products that enrich the future.
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