High torque precision positioning ultrasonic motor for multi-axis semiconductor manufacturing equipment.
Nanomotion Custom Stage
Heavy objects can achieve both high-speed movement and high-precision positioning by increasing torque with multiple ultrasonic motors.
Nanomotion's ultrasonic motors "SE" and "HR" are products capable of high-speed movement (up to 500mm/sec) and high precision positioning of 1nm, even in a vacuum. A notable feature is the driving force; the HR8 motor has a maximum torque of 32N. For example, using four HR8 motors can achieve a torque of 128N, allowing for the stacking of multiple stages or the movement of heavy payloads. *The payload capacity varies significantly depending on conditions such as movement speed, precision, and stage size. ■ 1nm Multi-Axis Precision Stage for Semiconductor Manufacturing Evaluation A 3-axis stage used within a vacuum chamber, featuring sub-nanometer step resolution with SE motors. ■ Stage for Electron Beam and Ion Beam (FIB) A 4-axis (X-Y-Z-θ) stage designed for inspection, vacuum-compatible, and non-magnetic. Achieves high resolution of 1nm with position stability below 6nm. ■ Stage for Light Sheet Microscopy Achieves an accuracy of 10nm and stable low-speed operation (200nm/sec). It features 5 axes: XYZ and Tip-Tilt. *For other examples, please refer to the "Examples of Achievements" section below.
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basic information
【Main Ultrasonic Features】 ■ HR Motor (Standard Type) Speed range of 1μm to 250mm/sec, step resolution of 1nm, maximum driving force of 32N ■ SE Motor (Latest Type) Speed range of 1μm to 500mm/sec, sub-nm step resolution, maximum driving force of 32N ■ EDGE Motor (Compact and Lightweight) Maximum speed of 120mm/sec, step resolution of 100nm, driving force of 300mN, mass of 0.55g
Price information
Estimates will be provided for custom products on a case-by-case basis. Additionally, multi-axis stages can also be created by combining standard stages.
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Applications/Examples of results
【Representative Stage Prototype and Development Examples (Domestic and International)】 ○ Multi-axis platform for laser communication with low Earth orbit satellites ○ Stage for atomic force microscopy ○ Precision rotating stage for synchrotron radiation facilities ○ 4-axis (X-Y-Z-T) stage for ion beam (FIB) inspection ○ 1nm multi-axis precision stage for semiconductor manufacturing evaluation ○ 5-axis low-speed motion stage for cell imaging ○ Autofocus module considering SWaP ○ Miniature gimbal for cameras mounted on drones ○ Drive module for lenses used in wafer inspection
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Company information
A workshop skilled in servo control. ○ In hydraulic servo control, we design and manufacture control devices, create control software, and collaborate with partner companies to design and produce optimal hydraulic units and hydraulic cylinders. We also select components such as hydraulic servo valves. ○ High-speed movement and high-precision positioning using ultrasonic motors. ○ Utilization in robots and unmanned transport vehicles with drivers for servo motors. ○ Controllers and control devices for construction machinery developed through contract development. ○ Creating moving objects such as hydraulic robots and designing and manufacturing 2-axis or 6-axis motion bases through industry-academia collaboration.