High torque precision positioning ultrasonic motor for multi-axis semiconductor manufacturing equipment.

Heavy objects can achieve both high-speed movement and high-precision positioning by increasing torque with multiple ultrasonic motors.

Nanomotion's ultrasonic motors "SE" and "HR" are products capable of high-speed movement (up to 500mm/sec) and high precision positioning of 1nm, even in a vacuum. A notable feature is the driving force; the HR8 motor has a maximum torque of 32N. For example, using four HR8 motors can achieve a torque of 128N, allowing for the stacking of multiple stages or the movement of heavy payloads. *The payload capacity varies significantly depending on conditions such as movement speed, precision, and stage size. ■ 1nm Multi-Axis Precision Stage for Semiconductor Manufacturing Evaluation A 3-axis stage used within a vacuum chamber, featuring sub-nanometer step resolution with SE motors. ■ Stage for Electron Beam and Ion Beam (FIB) A 4-axis (X-Y-Z-θ) stage designed for inspection, vacuum-compatible, and non-magnetic. Achieves high resolution of 1nm with position stability below 6nm. ■ Stage for Light Sheet Microscopy Achieves an accuracy of 10nm and stable low-speed operation (200nm/sec). It features 5 axes: XYZ and Tip-Tilt. *For other examples, please refer to the "Examples of Achievements" section below.

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