Bringing new visibility, reliability, and ease of use to gas detection in semiconductor processes and industrial manufacturing.
A 4-in-1 electrochemical multi-gas detector that can simultaneously measure four types of gas from over 35 available options. It uses patented technology to adjust the flow rate, ensuring error-free gas detection while monitoring locations up to 30 meters away. 【Features】 ■ Clear visibility ■ Easy calibration ■ Compact size, suitable for small spaces and complex process environments ■ PoE protocol ■ Integrated security *For more details, please download the PDF or contact us.*
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basic information
【Transmitter Dimensions】 Size (with cartridge unit): 136mm (height) x 83mm (width) x 152mm (depth) Weight (transmitter): 1.3kg Weight (cartridge): 0.17–0.22kg (depending on sensor type) 【Optional Relay Dimensions】 Size: 137mm (height) x 84mm (width) x 41mm (depth) Weight: 0.31kg 【Power Consumption】 Transmitter (normal state) 1: standard 5W Transmitter (pre-load state) 2: ≤11.45W Transmitter (with relay): ≤12.9W *Please refer to the catalog for details.
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Semiconductor processing Light industry manufacturing University laboratory Aerospace Drainage
Detailed information
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Gas detection control unit linked with the Gas Buster controller. By linking the gas concentration display alarm with the Gas Buster signal unit, it is possible to simultaneously check gas detectors located in multiple hazardous areas. Additionally, if the gas detector is indoors, the gas concentration can be checked in a safe location that is not a hazardous area, allowing for the establishment of a high-level safety management system.
Line up(34)
Model number | overview |
---|---|
MM-CAT | Cartridge |
MMS-00 | Dummy Sensor |
MMS-E2 | Hydrochloric Acid (HCl), Boron Trichloride (BCl3), Dichlorosilane (SiH2Cl2), Hydrobromic Acid (HBr) |
MMS-X2 | Silane (SiH4), Disilane (Si2H6) |
MMS-G2 | Hydrogen (H2) |
MMS-L2 | Chlorine (Cl2) |
MMS-A2 | Ammonia (NH3) |
MMS-C2 | Carbon Monoxide (CO) |
MMS-R2 | Phosphine (PH3) |
MMS-U2 | Ozone (O3) |
MMS-D2 | Oxygen (O2) |
MMS-S2 | Sulfur Dioxide (SO2) |
MMS-Z2 | Hydrofluoric Acid (HF), Boron Trifluoride (BF3) |
MMS-Q2 | Chlorine (Cl2) Low Concentration |
MMS-TR | Carbon Dioxide (CO2) IR |
MMS-L2 | Hydrogen (H2), Methane (CH4) |
MMS-R3 | Phosphine (PH3) |
MMS-C3 | Carbon Monoxide (CO) |
MMS-Z2 | Tungsten Hexafluoride (WF6) |
MMS-K2 | Arsine (ASH3) |
MMS-Z4 | Boron Trifluoride (BF3) Low Concentration |
MMS-Q2 | Bromine (Br2), Chlorine Dioxide (ClO2) |
MMS-T2 | Carbon Dioxide (CO2) |
MMS-K2 | Diborane (B2H6) |
MMS-ET | Ethylene Oxide (ETO) |
MMS-K2 | Germane (GeH4) |
MMS-Y2 | Hydrogen Cyanide (HCN) |
MMS-Z4 | Hydrofluoric Acid (HF) Low Concentration |
- | Hydrogen Selenide (H2Se) |
MMS-H4 | Hydrogen Sulfide (H2S) |
MMS-V2 | Nitric Oxide (NO) |
MMS-VN | Nitrogen Dioxide (NO2) |
MMS-ET | Tetraethyl Orthosilicate (TEOS) |
MMS-Z4 | Tungsten Hexafluoride (WF6) Low Concentration |
catalog(3)
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