Compatible with SEMI-F47 and SEMI-S2 standards, capable of supporting EFEMs for up to 4 FOUPs without a running device!
Kawasaki Heavy Industries, boasting the world's top market share, offers the "Wafer Transport Robot," a product that achieves high precision and high rigidity in operation through its unique drive mechanism. We provide the "NTJ Series," which realizes high precision and smooth movement thanks to its unique drive structure, and the "TTJ Series," which adopts a telescopic mechanism to achieve both low-position path lines and high-position transport. Additionally, we have the "NTH Series," which supports 4FOUP devices without a traveling mechanism, and the "NX Series," which can be installed in a space-saving manner. 【Features】 ■ Achieves high precision and high rigidity in operation through a unique drive mechanism ■ Complies with SEMI-F47 and SEMI-S2 standards, capable of supporting EFEM up to 4FOUP without a traveling mechanism ■ Compatible with ring frames and substrate transport *For more details, please download the PDF or feel free to contact us.
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【Software Features】 ■K-Fast - Software that facilitates the consideration of operations and supports robot implementation. *For more details, please download the PDF or feel free to contact us.
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Since starting production of Japan's first industrial robot in 1969, Kawasaki Heavy Industries has contributed to the development of various industries both domestically and internationally, alongside our customers, as a leading company in the field. As a pioneer in the industrial robot manufacturing sector, we have developed and supplied numerous high-quality and high-performance Kawasaki robots for various industries, including the automotive and electrical/electronic sectors, based on the technology and experience we have cultivated over more than 50 years of history. We propose solutions that meet our customers' needs, such as automation, labor-saving, productivity and quality improvement, and work environment enhancement.