Using in-situ heating TEM, we introduce a case study that visualizes structural changes in materials at the nanometer level during thermal processing of semiconductor devices, contributing to process development.
The technical information magazine The TRC News provides the latest information on analytical techniques that are useful for research and development, solving production troubles, and quality control. **Abstract** In the development and manufacturing of semiconductor devices, understanding the structural changes of materials during thermal processing is extremely important. By using heating in-situ TEM, it is possible to visualize the thermal behavior of materials during heat treatment at the nanometer level, gaining new insights into structural changes that can aid in process development such as film quality control. This paper introduces case studies using heating in-situ TEM to analyze (1) the crystallization growth mechanism of amorphous silicon films in conjunction with crystal structure analysis, (2) the thermal behavior of metal stacked films in conjunction with elemental analysis, and (3) the observation of the crystallization growth process of thin film ruthenium films in a planar configuration. **Table of Contents** 1. Introduction 2. Overview and Features of Heating In-Situ TEM 3. Case Studies of Heating In-Situ TEM Analysis 4. Conclusion
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Technical Information Magazine The TRC News "In-situ Observation of Semiconductor Materials Using Heated in-situ TEM" [Abstract] Understanding the structural changes of materials during thermal processing is crucial in the development and manufacturing of semiconductor devices. By using heated in-situ TEM, it becomes possible to visualize the thermal behavior of materials during heat treatment at the nanometer level, gaining new insights into structural changes that can aid in process development such as film quality control. This paper introduces cases where heated in-situ TEM was used for (1) analyzing the crystallization mechanism of amorphous silicon films in conjunction with crystal structure analysis, (2) understanding the thermal behavior of metal stacked films in conjunction with elemental analysis, and (3) observing the crystallization process of thin ruthenium films on a plane. [Table of Contents] 1. Introduction 2. Overview and Features of Heated in-situ TEM 3. Analysis Cases of Heated in-situ TEM 4. Conclusion [Figures and Tables] Figures 1-8: TEM images, SEM images, crystal orientation analysis, etc.
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At Toray Research Center, Inc., we provide technical support through analytical techniques and physical property analysis to address various challenges in research and development as well as production fields via contract analysis. Based on our long-standing achievements and extensive experience in analysis and physical property evaluation, we continue to strive to meet the advanced and diverse needs of our customers.
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