Visualization of reactive species behavior (1) Invasion of reactive species into narrow spaces
Comparison of Ar plasma treatment and oxygen plasma treatment using "PLAZMARK heat-resistant labels."
We installed the wafer with a gap and evaluated the movement of reactive species entering that gap using "PLAZMARK Heat Resistant" No. 101 attached to the back of the wafer. Comparing Ar plasma treatment and O2 plasma treatment, the O2 plasma treatment caused discoloration even at the center of the back side of the wafer, suggesting the presence of long-lived oxygen radicals that can wrap around. Additionally, since the back side of the wafer did not discolor with Ar plasma treatment, it is believed that Ar ions do not wrap around to the back side. 【Discharge Conditions】 ■ RF Plasma Device (Arios Co., Ltd.) - Ar gas = 5Pa, Power = 80W, Time = 60sec - O2 gas = 5Pa, Power = 80W, Time = 30sec *For more details, please refer to the related links or feel free to contact us.
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Sakura Color Products Corporation is a comprehensive stationery manufacturer headquartered in Morinomiya, Chuo Ward, Osaka City. The core technology of Sakura Color Products lies in its long-developed color-matching technology since its founding, as well as its comprehensive technology in the field of interfacial chemistry, cultivated through the formulation design and process design of drawing materials, writing instruments, and printing inks. The company has also developed unique inks that change color through chemical reactions with specific compounds such as energy sources like heat and light, as well as sterilization and disinfection gases. Additionally, the company conducts plastic molding, precision metal processing, and ink filling for tubes, marker and sign pen containers, and ballpoint pen containers at its own factory.