A low-cost system capable of performing limited-function fluorescence analysis.
Achieves a low price by limiting functions while equipped with detectors equivalent to high-performance products from other companies.
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basic information
The PEMS-1000 series photo-emission microscope system is a failure analysis device that detects weak light emission phenomena generated during the operation of semiconductor devices and flat panel displays (FPD), allowing for the identification of abnormal areas. It can be used in various situations, such as state confirmation during design and development stages, defect analysis, and analysis of defective products. 【Main Applications】 ● Confirmation of ESD/EOS failure locations ● Verification of dielectric breakdown and latch-up phenomena ● Identification of failure locations in input/output sections and internal circuits ● Drain current of FETs ● Error analysis based on emission wavelengths of opto-devices can be determined on-site with an optional spectrometer ● By equipping an optional YAG laser thin film processing device, it is possible to perform pre-treatment for marking and physical analysis such as FIB simultaneously with analysis ● Can be manufactured not only for backside analysis in an upright configuration but also for inverted systems Depending on the conditions of existing probers, modifications may allow for compatibility. We also accept the production of probes for emission microscopes from other manufacturers and various fixtures. Additionally, we can accommodate special applications and specifications.
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Applications/Examples of results
For more details, please download the PDF or feel free to contact us.
Detailed information
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YAG laser thin film processing system
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Image of a macro lens
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Inverted system capable of dual-side probing.
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Detection image from thermal analysis camera.
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Probe for emission microscopes made by other companies.
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Backside analysis fixture for emission microscopes from other manufacturers.
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Image with third-party emission microscope probes and detachable backside analysis fixtures installed.
Company information
TNS Systems LLC is a company that delivers customized systems for semiconductor and FPD-related manufacturing and inspection equipment according to your needs. Our main products include failure analysis equipment used for the analysis of semiconductors, YAG laser thin film processing systems for processing thin films on sample surfaces, and electrical characteristic evaluation systems primarily based on probers. These products are used in research institutions and departments for development, analysis, and quality assurance, and have received high praise. Please feel free to contact us if you have any inquiries.