High-precision hexapod stage BREVA
BREVA is specially designed to provide high angular precision. With a resolution of XYZ 0.5 µm and rotation 2.5 µrad, it enables angular positioning of objects such as samples, probes, and sensors. It can be used in an orientation-free manner, whether vertical, horizontal, or upside down.
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basic information
XY Stroke ±75mm Z Stroke ±50mm Tilt <±20° Rotation (ZΘ) ±22° Repeatability (XYZ) ±0.5μm Repeatability (Rx, Ry, Rz) ±2.5μrad Size φ606mm Height (Z midpoint) 350mm Opening φ250mm Load Capacity 200kg ● For more details, please contact us or download the catalog.
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■ Manufacturing and sales of laser equipment and its application devices and parts, as well as import and export operations ■ Manufacturing and sales of electrical and electronic equipment and its application devices and parts, as well as import and export operations ■ Sales of optical equipment and its application devices and parts, as well as import and export operations ■ Manufacturing and sales of medical, physical, and measuring instruments and their application devices and parts, as well as import and export operations ■ Manufacturing and sales of adhesives, adhesive tapes, adhesive sheets, and their equipment and devices, as well as import and export operations ■ All operations incidental to the above items