To solve the issues caused by static electricity in the precision cleaning of semiconductor components, we provide functional water with adjusted specific resistivity of ultra-pure water.
■Overview Conventional precision cleaning uses ultra-pure water with almost no ionic components, making it prone to static electricity, which can lead to product defects due to issues such as: - Circuit destruction due to static electricity (= electrostatic breakdown) - Surface charging of the items being cleaned and re-adhesion of fine particles due to static electricity The ultra-pure water static electricity prevention device MEGCON reduces the generation of static electricity from ultra-pure water by creating functional water with adjusted resistivity, contributing to a reduction in product defects (improving yield). ■Features - Low risk of fine particle contamination and low consumption of carbon dioxide - Quick control to the target resistivity value in response to flow rate fluctuations due to feedback control - Minimal pressure loss of ultra-pure water during equipment entry and exit - Lineup of CE-marked series suitable for export to Europe - Supports large flow rates (large flow functionality available) ■Principle Carbon dioxide is dissolved in ultra-pure water through a membrane.
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basic information
■Liquid Contact Part Cell (Carbon Dioxide Introduction Part): PP ■Utility - Ultrapure Water Pressure: Normal use below 0.35 MPa (maximum 0.45 MPa) / Temperature: 5–35°C / Water Quality: 10 MΩ·cm or higher - CO2 Gas Pressure: 0.1–0.2 MPa / Temperature: 5–35°C / Purity: 99.5% or higher - Dry Air (for membrane drying) Not required due to built-in air pump - Power Supply AC 100-240V (50/60Hz) ■Standard Accessories - Instruction Manual - Inspection Certificate - 100-120V: Power Cord 2.8m (with plug) - 200-240V: Power Cord 5m (without plug) - The S type includes a buzzer with a two-color lamp + leveler and caster.
Price range
P5
Delivery Time
Applications/Examples of results
- Cleaning in the dicing process - High-pressure jet cleaning - Scrubber cleaning - Cleaning of LCD panels - Cleaning of photomasks and reticles
Line up（10）
| Model number | overview |
|---|---|
| 1000ACD | Maximum flow rate: 1000L, control range: 0.2~2.0MΩ・cm, dimensions: 520W×400D×1,150H mm, weight: 65kg, piping: PVC/blade hose, ultrapure water connection diameter: Rc1/2 |
| 1000ACD-S | Maximum flow rate: 1000L, control range: 0.2~2.0MΩ・cm, dimensions: 520W×400D×1,415H mm, weight: 66kg, piping: PVC/blade hose, ultrapure water connection diameter: Rc1/2 |
| 1200ACD | Maximum flow rate: 1000L, control range: 0.1~0.5MΩ・cm, dimensions: 520W×400D×1,150H mm, weight: 65kg, piping: PVC/blade hose, ultrapure water connection diameter: Rc1/2 |
| 1200ACD-S | Maximum flow rate: 1000L, control range: 0.1~0.5MΩ・cm, dimensions: 520W×400D×1,415H mm, weight: 66kg, piping: PVC/blade hose, ultrapure water connection diameter: Rc1/2 |
| 2000ACD | Maximum flow rate: 2000L, control range: 0.2~2.0MΩ・cm, dimensions: 520W×400D×1,150H mm, weight: 65kg, piping: PVC/blade hose, ultrapure water connection diameter: Rc3/4 |
| 2000ACD-S | Maximum flow rate: 2000L, control range: 0.2~2.0MΩ・cm, dimensions: 520W×400D×1,415H mm, weight: 66kg, piping: PVC/blade hose, ultrapure water connection diameter: Rc3/4 |
| 1220ACD | Maximum flow rate: 2000L, control range: 0.15~1.0MΩ・cm, dimensions: 520W×400D×1,150H mm, weight: 65kg, piping: PVC/blade hose, ultrapure water connection diameter: Rc3/4 |
| 1220ACD-S | Maximum flow rate: 2000L, control range: 0.15~1.0MΩ・cm, dimensions: 520W×400D×1,415H mm, weight: 66kg, piping: PVC/blade hose, ultrapure water connection diameter: Rc3/4 |
| 2040ACD | Maximum flow rate: 4000L, control range: 0.2~2.0MΩ・cm, dimensions: 520W×400D×1,150H mm, weight: 70kg, piping: PVC, ultrapure water connection diameter: Rc1 1/4 |
| 2040ACD-S | Maximum flow rate: 4000L, control range: 0.2~2.0MΩ・cm, dimensions: 520W×400D×1,415H mm, weight: 71kg, piping: PVC, ultrapure water connection diameter: Rc1 1/4 |
Company information
Our company designs and manufactures pharmaceutical water systems, ultrapure water production systems, membrane process systems, and their application equipment based on the advanced membrane technology we have cultivated over many years. We respond to user needs such as product development, quality enhancement, rationalization, energy conservation, resource saving, and environmental protection. Please feel free to contact us with your requests.