To solve the issues caused by static electricity in the precision cleaning of semiconductor components, we provide functional water with adjusted specific resistivity of ultra-pure water.
■Overview Normal precision cleaning is performed with ultra-pure water that contains almost no ionic components, making it prone to static electricity, which can lead to product defects due to issues such as: - Circuit destruction due to static electricity (= electrostatic breakdown) - Surface charging of the items being cleaned and re-adhesion of fine particles due to static electricity The ultra-pure water static electricity prevention device MEGCON contributes to reducing product defects (improving yield) by suppressing the generation of static electricity from ultra-pure water by creating functional water with adjusted specific resistivity. ■Features - Low risk of fine particle contamination and reduced consumption of carbon dioxide - Quick control to the target specific resistivity value in response to flow rate fluctuations due to feedback control - Minimal pressure loss of ultra-pure water during entry and exit of the device - Lineup of CE marking series that can be exported to Europe - Supports large flow rates (large flow functionality available) ■Principle Carbon dioxide is dissolved in ultra-pure water through a membrane.
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basic information
■Liquid Contact Part Cell (Carbon Dioxide Introduction Part): PP ■Utility - Ultrapure Water Pressure: Normal use 0.35 MPa or below (maximum 0.45 MPa) / Temperature: 5–35℃ / Water Quality: 10 MΩ·cm or higher - CO2 Gas Pressure: 0.1–0.2 MPa / Temperature: 5–35℃ / Purity: 99.5% or higher - Power Supply AC100-240V (50/60Hz) ■Dry Air (for Membrane Drying) - PRC Series: Not required as it has a built-in air pump - FRC Series: 0.1–0.2 MPa ■Standard Accessories - Instruction Manual - Inspection Certificate - 100-120V: Power Cord 2.8m (with plug) - 200-240V: No cord (please connect to terminal block)
Price range
P5
Delivery Time
Applications/Examples of results
- Cleaning in the dicing process - High-pressure jet cleaning - Scrubber cleaning - Cleaning of LCD panels - Cleaning of photomasks and reticles, etc.
Line up（4）
| Model number | overview |
|---|---|
| 1000ACD | Maximum flow rate: 1000L, control range: 0.2~2.0MΩ・cm, dimensions: 480W×355D×200H mm, weight: 15kg, piping: PVC/blade hose, ultra-pure water connection diameter: nozzle for hose (IDφ19 for blade hose) |
| 1200ACD | Maximum flow rate: 1000L, control range: 0.1~0.5MΩ・cm, dimensions: 480W×355D×200H mm, weight: 15kg, piping: PVC/blade hose, ultra-pure water connection diameter: nozzle for hose (IDφ19 for blade hose) |
| 2000ACD | Maximum flow rate: 2000L, control range: 0.2~2.0MΩ・cm, dimensions: 480W×355D×200H mm, weight: 15kg, piping: PVC/blade hose, ultra-pure water connection diameter: nozzle for hose (IDφ19 for blade hose) |
| 1220ACD | Maximum flow rate: 2000L, control range: 0.15~1.0MΩ・cm, dimensions: 480W×355D×200H mm, weight: 15kg, piping: PVC/blade hose, ultra-pure water connection diameter: nozzle for hose (IDφ19 for blade hose) |
Company information
Our company designs and manufactures pharmaceutical water systems, ultrapure water production systems, membrane process systems, and their application equipment based on the advanced membrane technology we have cultivated over many years. We respond to user needs such as product development, quality enhancement, rationalization, energy conservation, resource saving, and environmental protection. Please feel free to contact us with your requests.