Measurable inside the vacuum deposition machine - non-contact online deposition film resistance (thickness) gauge.
In a vacuum deposition machine, the resistance value (thickness) of the deposited films (aluminum, copper, silicon dioxide SiO2) is measured online and non-contact.
Measurement of aluminum and copper thin film resistance (thickness), non-contact online in a vacuum, compatible with double-sided deposition. - Extensive track record in vacuum environments, with over 500 sets in operation domestically. - Durable and semi-permanent sensors that are resistant to shock and vibration (some have been operating for up to 40 years). - Also well-received as a convenient lab measurement device.
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basic information
- Measurement range: For thin films 100Ω/□ to 0.20Ω/□ For thick films (1μm, 2μm copper, etc.) 0.20Ω/□ to 0.01Ω/□ - Measurement distance: 1~3mm *For inspections in the atmosphere, the detection part is measured in close contact. - Standard specifications are available 45 to 60 days after order.
Price information
It is an open price, but we will provide a quote that fits your budget. Please feel free to consult with us.
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Applications/Examples of results
This is an essential instrument for such places: - Double-sided deposition - Difficult to visualize with fluorescent lights due to low transmitted light, cannot use a transmittance meter, metal deposition on opaque films and papers, etc. (in a vacuum) - Product inspection of deposited films coated or painted with an insulator (in the atmosphere)
Detailed information
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The figure is an illustrative image of the usage condition inside a vacuum deposition tank (in the case of double-sided deposition). Typically, it is equipped with as many crucibles as needed.
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<Edge Controller> Captures changes in the shape of extruded resin and automatically controls the take-up machine speed (or extruder rotation speed) to enable stable production. Depending on the situation (such as cell structure, transparency, etc.), various sensors can be used to capture and control the changes. <Vacuum Film Resistance Meter (Thickness Gauge)> This is a vacuum film resistance meter using the eddy current method. It measures the resistance values of aluminum, copper, and silver vapor-deposited films. It can also display thickness.