The detection depth increases, allowing for the evaluation of deeper areas!
We would like to introduce our evaluation of buried interfaces using "Hard X-ray Photoelectron Spectroscopy (HAXPES) with Synchrotron Radiation." X-ray Photoelectron Spectroscopy (XPS) allows for the analysis of surface composition and state, making it an essential technique for surface analysis. While laboratory-type XPS (Al Kα: 1.5 keV) is limited to evaluating extreme surfaces of about 3 nm, using external facilities for Hard X-ray Photoelectron Spectroscopy (HAXPES) at 8 keV enables the evaluation of deeper regions, such as buried interfaces in multilayer structures and stack structures close to actual devices. 【Features】 ■ Greater detection depth compared to conventional XPS ■ Measurement of photoelectrons from deeper energy levels ■ Easier state analysis due to the absence of overlaps with simultaneously generated Auger electrons ■ Utilization of third-generation synchrotron facilities (SPring-8) as a high-brightness X-ray source *For more details, please download the PDF or feel free to contact us.
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【Examples】 ■Measurement of multilayer films (metal/insulating films) (HAXPES) ■Evaluation of band bending in p-GaN and p+-GaN (HAXPES) *For more details, please download the PDF or feel free to contact us.
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【Applications (Partial)】 ■ Evaluation of bulk thick film samples (secondary batteries, etc.) ■ Evaluation of multilayer film interfaces such as stacked films (gate stacks, GMR, MRAM) ■ Evaluation through caps for films with post-oxidation and deliquescence properties ■ Evaluation of in-gap states of transparent electrodes and transparent semiconductors in solar cells (ZnO, IGZO, etc.) ■ Evaluation of band alignment and bending in electrode/GaN structures *For more details, please download the PDF or feel free to contact us.
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Our company offers contract analysis services. Since our establishment in August 2002, we have utilized reliable analysis and measurement technologies along with state-of-the-art equipment to provide optimal nano-level microfabrication, analysis, evaluation of reliability, environmental safety chemical analysis, and service solutions for a wide range of markets centered around semiconductors, liquid crystals, metals, and new materials. Please feel free to contact us if you have any requests.
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