You can check the gas components released from the Ta board and the desorption temperature of hydrogen!
As part of the widely used "hydrogen annealing evaluation" in semiconductor manufacturing, we present a case measured using TDS (Thermal Desorption Spectroscopy). By performing mass spectrometry while heating in a vacuum, we were able to confirm the desorbed gas components from the Ta plate and the desorption temperature of hydrogen. Additionally, by mass analyzing the desorbed gases, we can identify the types of gases and understand the desorption behavior of specific components. [Case Overview] - Heating desorption gas profile from the sample - Identification of desorbed gas species and comparison of desorbed gas amounts through mass spectrometry (m/z = 1 to 199) *For more details, please download the PDF or feel free to contact us.
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Our company offers contract analysis services. Since our establishment in August 2002, we have utilized reliable analysis and measurement technologies along with state-of-the-art equipment to provide optimal nano-level microfabrication, analysis, evaluation of reliability, environmental safety chemical analysis, and service solutions for a wide range of markets centered around semiconductors, liquid crystals, metals, and new materials. Please feel free to contact us if you have any requests.